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Fabrication and properties of piezoresistive cantilever beam with porous silicon element

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7 Author(s)
Domanski, K. ; Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warszawa, Poland ; Grabiec, P. ; Marczewski, J. ; Gotszalk, T.
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We present a highly sensitive nanobalance based on a piezoresistive cantilever beam with a porous silicon element. Measurements of a shift of the cantilever resonance frequency allow estimation of adsorbed substance weight (e.g., gas, steam) with single nanogram resolution. Applications of such a device include humidity and gas detection. Moreover, a cantilever beam with a porous silicon element enables combined investigations of mechanical and adsorption properties of porous silicon. The fabrication process of the device has been described as well. © 2003 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 1 )

Date of Publication:

Jan 2003

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