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Microprocess for fabricating carbon-nanotube probes of a scanning probe microscope

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6 Author(s)
Nakayama, Yoshikazu ; Department of Physics and Electronics, Osaka Prefecture University, Osaka 599-8531, Japan ; Nishijima, Hidehiro ; Akita, Seiji ; Hohmura, Ken I.
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We have developed microprocesses to make carbon-nanotube probes for a scanning probe microscope. The processes contain electric-field induced transportation, welding and fixation by electron-beam carbon deposition and are performed in a scanning electron microscope equipped with two individual manipulable stages. Using the nanotube probes produced, a fine structure of helical and twinned deoxyribonucleic acid and an abrupt height transition with high fidelity in a 4.7 GB digital versatile disk are imaged with tapping-mode atomic force microscopy in air. © 2000 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:18 ,  Issue: 2 )