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Analytical model of electrostatic membrane-Based actuators

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5 Author(s)
Maj, C. ; LAAS-CNRS, Univ. de Toulouse, Toulouse ; Olszacki, M. ; Al Bahri, M. ; Pons, P.
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In the design process, modelling is a fundamental stage which allows the designer to obtain a general overview of the device performance. Very often, this phase is very time-consuming, especially if a well optimized device which fulfils very specific requirements is to be fabricated. Hence, a fast and reliable technique of simulation is needed and accurate tools have to be used to achieve this goal. In this paper, a simple method of electrostatic actuator modelling based on reduced analytical equations is presented and compared to commonly used FEM simulations. This method, despite some limitations, gives accurate results in much shorter time which might be crucial during the optimization phase.

Published in:

Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on

Date of Conference:

26-29 April 2009