Cart (Loading....) | Create Account
Close category search window

Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Malyshev, M.V. ; Bell Laboratories, Lucent Technologies, Murray Hill, New Jersey 07974 ; Donnelly, V.M.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

A method is described for determining the electron temperature of a low pressure plasma of the type used in microelectronics materials processing. A small amount of an equal mixture of He, Ne, Ar, Kr, and Xe is added to the process gas (in this example Cl2) and the intensities of optical emission lines from the Paschen 2p levels of the rare gases are recorded. The observed emission intensities are compared with those computed from a model that includes electron impact excitation from the ground state, as well as two-step electron impact excitation through intermediate metastable levels. This latter route is shown to be the dominant one for nearly half of the levels. Using adjusted, published electron impact excitation cross sections and assuming a Maxwellian electron energy distribution, the electron temperature (Te), the only adjustable parameter, was determined from the best match between the observed and computed intensities. For a high density, helical resonator Cl2 plasma at 10 mTorr, Te=2.2±0.5 eV was determined from this method. This value is about 1 eV lower than the typical values reported for high density inductively coupled Cl2 plasmas at similar pressures. While the precision of the method is expected to be high, the accuracy of Te determined from optical emission would likely be improved with more accurate cross section data. Implications for actinometric determination of species concentrations in plasmas are also discussed. © 1997 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:15 ,  Issue: 3 )

Date of Publication:

May 1997

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.