Development, Modeling, and Control of a Micro-/Nanopositioning 2-DOF Stick–Slip Device

The studies presented in this paper are motivated by the high performances required in micromanipulation/microassembly tasks. For that, this paper presents the development, the modeling, and the control of a 2-DOF (in linear and angular motion) micropositioning device. Based on the stick-slip motion principle, the device is characterized by unlimited strokes and submicrometric resolutions. First, experiments were carried out to characterize the performances of the micropositioning device in resolution and speed. After that, a state-space model was developed for the substep functioning. Such functioning is interesting for a highly accurate task like nanopositioning. The model is validated experimentally. Finally, a controller was designed and applied to the micropositioning device. The results show good robustness margins and a response time of the closed-loop system.