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Powerful Actuation of Magnetized Microtool by Focused Magnetic Field on a Disposable Microfluidic Chip

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4 Author(s)
Arai, F. ; Tohoku Univ., Sendai ; Sakuma, S. ; Yamanishi, Y. ; Onda, K.

We succeeded in powerful noncontact actuation of magnetically driven microtool (MMT) by magnetizing it and focusing magnetic field in a microfluidic chip. Novelty of this paper is summarized as follows. (1) We employed neodium powder as the main component of MMT. The density of magnetic flux was improved about 100 times larger after magnetization. (2) We fabricated a pair of magnetic sharp needles in the chip by electroplating. MMT was placed between the needles and the density of magnetic flux was improved about 3 times larger. As a result, we succeeded in powerful actuation of MMT in the chip. Drive frequency was improved about 10 times faster (up to 180 Hz).

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009

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