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A Novel Stress-Gradient-Robust Metal-Contact Switch

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3 Author(s)
Hojr Sedaghat-Pisheh ; University of California, San Diego, California, USA ; Jung-Mu Kim ; Gabriel M. Rebeiz

This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS switch with low sensitivity to stress gradients and temperature variations. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and has excellent microwave performance to > 40 GHz.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009