This paper describes a newly developed photocurable polymer with ferromagnetic property for microstereolithography to fabricate magnetic microactuators with three dimensional (3D) structures and its application to a wirelessly controllable swimming micromachine and microscrewpump. This polymer was prepared by mixing a photocurable polymer with magnetic particles, together a viscosity-increasing agent to maintain the particle dispersion. It was demonstrated that this polymer were rapidly fabricated into various complicated 3D magnetic microstructures using microstereolithography. Finally, a swimming micromachine and microscrewpump driven by magnetic force wirelessly were developed using screw-type microactuators made of the polymer with a diameter of submillimeter order.
Published in:
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Date of Conference: 25-29 Jan. 2009