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Measurement on snapback holding voltage of high-voltage LDMOS for latch-up consideration

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5 Author(s)
Wen-Yi Chen ; Nanoelectron. & Gigascale Syst. Lab., Nat. Chiao-Tung Univ., Hsinchu ; Ming-Dou Ker ; Yeh-Jen Huang ; Yeh-Ning Jou
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In high voltage (HV) ICs, the latch-up immunity of HV devices is often referred to the TLP-measured holding voltage because the huge power generated from DC curve tracer can easily damage HV device during measurement. An n-channel lateral DMOS (LDMOS) was fabricated in a 0.25-mum 18-V bipolar CMOS DMOS (BCD) process to investigate the validity of TLP-measured snapback holding voltage to the device immunity against latch-up. Experimental results from curve tracer measurement and transient latch-up test show that 100-ns TLP underestimates the latch-up susceptibility of the 18-V LDMOS. By using the long-pulse TLP measurement, snapback holding voltage of the HV device has been found to degrade over time due to the self-heating effect. As a result, since the latch-up event is a reliability test with the time duration longer than millisecond, TLP measurement is not suitable for applying to investigate the snapback holding voltage of HV devices for latch-up.

Published in:

Circuits and Systems, 2008. APCCAS 2008. IEEE Asia Pacific Conference on

Date of Conference:

Nov. 30 2008-Dec. 3 2008