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Interdigitated sensorial system on flexible substrate

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12 Author(s)
A. Pecora ; CNR-IMM, Institute for Microelectronic and Microsystems Via del Fosso del Cavaliere 100, 00133 Rome, Italy ; E. Zampetti ; S. Pantalei ; A. Valletta
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In this paper we present the design and fabrication of two flexible sensor devices: humidity sensor and ammonia sensor integrated with electronic circuit interface on thin flexible substrate (8 mum). The transducers layout has been optimized by means of numerical simulations. A thin layer of Bisbenzocyclobytene (BCB) is used as dielectric sensitive material in humidity sensor. Conversely a mixed polymer layer based on polyaniline emeraldine base (PANi-EB) is used as sensing conductive polymer for ammonia.

Published in:

Sensors, 2008 IEEE

Date of Conference:

26-29 Oct. 2008