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Laser-machined piezoelectric cantilevers for mechanical energy harvesting

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6 Author(s)
Hyunuk Kim ; Materials Science and Engineering, University of Texas, Arlington, TX. ; Vishwas Bedekar ; Rashed Adnan Islam ; Woo-ho Lee
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In this study, we report results on a piezoelectric- material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8 m/s2). The device was found to generate continuous power of 1.13 muW at 870 Hz across a 288.5 kOmega load with a power density of 301.3 muW/cm3.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:55 ,  Issue: 9 )