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MEMS inertial sensors and their applications

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1 Author(s)
Maenaka, K. ; Grad. Sch. of Eng., Univ. of Hyogo, Himeji

Micro electro mechanical systems (MEMS) technology has developed considerably in recent years and many sensors utilizing this technology are available in the market. MEMS technology enables miniaturization, mass production, and cost reduction of many sensors. In particular, MEMS inertial sensors that include an acceleration sensor and an angular velocity sensor (gyroscope, or simply ldquogyrordquo) are the most popular devices. Applications of inertial sensors have now extended into the field of networked sensing systems. In this presentation, we will describe current MEMS inertial sensors and their applications.

Published in:

Networked Sensing Systems, 2008. INSS 2008. 5th International Conference on

Date of Conference:

17-19 June 2008