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Novel integration process and performances analysis of Low STandby Power (LSTP) 3D multi-channel CMOSFET (MCFET) on SOI with metal / high-K gate stack

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19 Author(s)
E. Bernard ; CEA/LETI, Minatec, 17 rue des Martyrs, 38054 Grenoble, France ; T. Ernst ; B. Guillaumot ; N. Vulliet
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For the first time, ultra low IOFF (16.5 pA/mum) and high IONN,P (2.27 mA/mum and 1.32 mA/mum) currents are obtained with a multi-channel CMOSFET (MCFET) architecture on SOI with a metal/high-K gate stack. This leads to the best ION/IOFF ratios ever reported: 1.4 times 108 (0.8 times 108) for 50 nm n- (p-) MCFETs. We show, based on specifically developed integration process, characterization methods and analytical modeling, how those performances are obtained thanks to specific 3D MCFET features, in particular, transport properties, saturation regime and electrostatic behavior.

Published in:

2008 Symposium on VLSI Technology

Date of Conference:

17-19 June 2008