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A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

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4 Author(s)
Lee, J.E.-Y. ; Dept. of Eng., Univ. of Cambridge, Cambridge ; Bahreyni, Behraad ; Yong Zhu ; Seshia, A.A.

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb.

Published in:

Electron Device Letters, IEEE  (Volume:29 ,  Issue: 7 )