A CMOS Readout Circuit for SOI Resonant Accelerometer With 4-$\mu \rm g$ Bias Stability and 20-$ \mu\rm g/\sqrt{{\hbox{Hz}}}$ Resolution

A fully differential CMOS readout circuit for SOI resonant accelerometer is reported. The readout circuit is essentially an oscillator, consisting of an oscillator and a low noise automatic amplitude control (AAC) loop. A differential sense resonator is proposed to facilitate fully differential circuit topology and improves the SNR under a 3.3-V supply. A second-order AAC loop filter and a novel chopper stabilized rectifier are employed in the AAC loop to remove the noises, in particular, the 1/f noise, and to minimize the phase noise caused by the amplitude stiffening effect. The strong driving feedthrough is avoided by separating the drive and sense operation in the time domain, while using the same electrodes. The complete resonant accelerometer operates under a 3.3-V supply and achieves 140-Hz/g scaling factor, 20 mug/radicHz resolution and 4 mug bias stability. The readout circuit draws 7 mA under 3.3-V supply.