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Passive Reduced-Order Macromodeling Algorithm for Microelectromechanical Systems

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4 Author(s)
Rumi Zhang ; Dept. of Electr. & Comput. Eng., Univ. of Calgary, Calgary, AB ; Wei Wang ; Anestis Dounavis ; Graham A. Jullien

In this paper, we present a passive reduced-order macromodeling algorithm for second-order dynamic systems of linear microelectromechanical systems (MEMS) devices. The proposed reduction algorithm is based on congruent transformations. The system equations of MEMS devices, given by finite-element methods (FEMs), are converted to state-space forms that are compatible with passive Krylov subspace methods. To achieve this, a modified matrix equation is proposed for second-order MEMS dynamics. In addition, the generalized procedure is provided for first-order heat transfer problems and second-order structure dynamic problems to ensure that the discretized FEM system satisfies all the necessary conditions to guarantee the passivity of the reduced-order system. Finally, numerical examples are provided to demonstrate the validity of the proposed passive reduction technique.

Published in:

Journal of Microelectromechanical Systems  (Volume:17 ,  Issue: 3 )