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Nanostructured Silicon for Optical Biosensors

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7 Author(s)
Mihaela Miu ; National Institute for Research and Development in Microtechnologies (IMT-Bucharest), P.O.Box 38-160, Bucharest, Romania, fax: 4021.2307519, tel.: 4021.4908412/33 ; Irina Kleps ; Lorenzo Pavesi ; Florea Craciunoiu
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A new silicon (Si) based transducer containing an assembly of microstructures (pyramidal and prismatic) and nanostructured elements (porous silicon) is proposed for future integration in a complex optical biosensor device. The morphology of the experimental structures was investigated using different microscopic techniques and optical properties were studied by photoluminescence (PL) measurements.

Published in:

2007 International Semiconductor Conference  (Volume:2 )

Date of Conference:

Oct. 15 2007-Sept. 17 2007