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Concepts for Carbon Nanotube Sensors

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1 Author(s)
Christofer Hierold ; Micro and Nanosystems, ETH Zurich, 8092 Zurich, SWITZERLAND. Tel.: +41 44 63 23143; E-mail: hierold@micro.mavt.ethz.ch

This paper reports on concepts for carbon nanotube based sensors for mechanical and chemical quantities. We focus on single-walled carbon nanotubes as "simple" macro molecular functional structures with an option for integration in micro- and nanosystems or MEMS and NEMS and we discuss topics of relevance for fabrication. An extended reference list is included.

Published in:

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

10-14 June 2007