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Lowering Cost of Ownership through Predictive Maintenance

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2 Author(s)
Conley, C. ; Nikon Precision Inc., Belmont ; Mootz, D.D.

The use of predictive maintenance can return significant gains in total tool cost of ownership (COO) through reductions in parts usage and storage, unscheduled downtime, and maintenance time.

Published in:

Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI

Date of Conference:

11-12 June 2007