By Topic

A Methodology for Measuring, Reporting, Navigating, and Analyzing Overall Equipment Productivity (OEP)

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)

This paper will focus on a proposal for a methodology, namely the fab overall equipment productivity (OEP) X-factor Contribution Box (FOX BOXcopy). Based on overall equipment efficiency (OEE) which is already widely in use in the semiconductor industry, the pivotal data analysis tool in this methodology is a two-dimensional, easily comprehensible visualization interface from which the user could readily discern which quadrant each toolset (or equipment) in the fab belongs to, what the extent of its OEP's deviation from plan is, and hence finally and most importantly which tools provide the most scope for improving the fab's X-factor (and hence, cycle time).

Published in:

Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI

Date of Conference:

11-12 June 2007