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Planar and multiple-gate transistors with silicon-carbon source/drain

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1 Author(s)
Yee-Chia Yeo ; Dept. of Electr. & Comput. Eng., National Univ. of Singapore

We explore technology options for the enhancement of electron mobility in n-FETs, focusing on channel strain engineering using lattice-mismatched source/drain (S/D) materials. By employing silicon-carbon (Si1-yCy) in the S/D regions, lateral tensile strain in the Si channel is induced for electron mobility and drive current IDsat improvement. Further performance enhancement is achieved by the combination of multiple-stressors, e.g. Si1-yCy S/D and silicon nitride SiN liner stressor. This is demonstrated on bulk planar transistors, silicon-on-insulator planar transistors, and multiple-gate transistors. Process integration issues and strain enhancement approaches are discussed

Published in:

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Date of Conference:

23-26 Oct. 2006