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Single Metal Gate with Dual Work Functions for FD-SOI and UTB Double Gate Technologies

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10 Author(s)
Daniel Pham ; Freescale Assignee, 2706 Montopolis Drive, Austin TX 78741. Tel.: 512-356-7036, Email: ; Hongfa Luan ; Kaveri Mathur ; Barry Sassman
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In this paper, we demonstrate an integratable single metal gate (TiSiN) on HfxSixOy with dual work functions (4.44eV and 4.83eV), achieved by varying the metal thickness. These structures may be used for FD-SOI and double gate ultra-thin body devices. Close to symmetric Vt is achieved: 0.32V and -0.37V for long channel FD-SOI nMOS and pMOS devices, respectively. The device shows good sub-threshold slope values, as low as 62mV/dec and 75mV/dec for 1mum and 0.2mum devices, respectively

Published in:

2006 IEEE international SOI Conferencee Proceedings

Date of Conference:

2-5 Oct. 2006