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Browse Journals & Magazines > Sensors Journal, IEEE ...> Volume:7 Issue:2 Help

Parallel Detection of Si-Based Microcantilevers Resonant Frequencies Using Piezoresistive Signals Downmixing Scheme

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4 Author(s)
Mathieu, F. ; Lab. for Anal. & Archit. of Syst., Nat. Center of Sci. Res., Toulouse ; Saya, D. ; Bergaud, C. ; Nicu, L.

Piezoresistive microcantilevers were developed to be used as displacement or force sensors associated with self-detection onboard electronic systems. The aim of this work was to realize a parallel integrated and compact detection system without the need for an optical readout scheme. The electronics developed specifically for this application, when dynamically operated, allows us to measure each piezoresistive microcantilever resonance frequency (by achieving at the same time an enhancement of the quality factor) with an accuracy of 0.1 Hz

Published in:
Sensors Journal, IEEE  (Volume:7 ,  Issue: 2 )

Date of Publication: Feb. 2007

Page(s):
172 - 178
ISSN :
1530-437X
INSPEC Accession Number:
9289718
Digital Object Identifier :
10.1109/JSEN.2006.886872
Product Type:
Journals & Magazines
Date of Current Version :
02 January 2007
Issue Date :
Feb. 2007
Sponsored by :
IEEE Sensors Council

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