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Piezoresistive Cantilever Beam for Force Sensingin Two Dimensions

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3 Author(s)
T. Chu Duc ; Delft Univ. of Technol. ; J. F. Creemer ; Pasqualina M. Sarro

A novel two-dimensional piezoresistive nano-Newton resolution force sensing cantilever is presented. The silicon cantilever is fabricated using bulk micromachining. Two 500-nm-thick p-doped epitaxial silicon piezoresistive sensors are located on both sides of the cantilever. This structure detects both the lateral and vertical applied forces by electronic switching between two configurations of a Wheatstone bridge. A force sensitivity is measured up to 100 and 540 V/N for lateral and vertical configurations, respectively. The corresponding force resolution is estimated at 21 and 4 nN, respectively. This force-sensing cantilever can be used for measuring the contact force between manipulating tools and small objects in, e.g., living cell handling, minimally invasive surgery, and microassembly

Published in:

IEEE Sensors Journal  (Volume:7 ,  Issue: 1 )