Referenced Items are not available for this document.
This paper presents an RF MEMS switched-capacitor suitable for tunable filters and reconfigurable matching networks. The switched-capacitor results in a capacitance ratio of 1.5-2 depending on the design, and a very high-Q (> 225) at X to Ku-band frequencies. The switched-capacitor has been tested at 1 W of RF power at 8 GHz for > 11 billion cycles under hot-switched conditions and a uni-polar actuation voltage of 0-50 V, with virtually no change in the C-V curve. The measured switching and release time is 8 mus. The main reason for this reliability performance is the absence of all dielectric layers in the RF MEMS capacitor
Published in:
Microwave Symposium Digest, 2006. IEEE MTT-S International
Date of Conference: 11-16 June 2006
- Page(s):
- 31 - 34
- ISSN :
- 0149-645X
- E-ISBN :
- 0-7803-7542-5
- Print ISBN:
- 0-7803-9541-7
- INSPEC Accession Number:
- 9112236
- Conference Location :
- San Francisco, CA
- Digital Object Identifier :
- 10.1109/MWSYM.2006.249901
- Product Type:
- Conference Publications
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