Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems.<
Published in:
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on
(Volume:42
,
Issue:
1
)
Date of Publication: Jan. 1995