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Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry

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3 Author(s)
Weijie Yun ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; R. T. Howe ; P. R. Gray

The authors have described a surface micromachined accelerometer with digital electrostatic feedback using Sigma - Delta modulation technique, fabricated in a modular CMOS/microstructure process. Detection circuits have been tested successfully. The unity gain buffer with low input capacitance can also be used for other capacitive detection applications. The accelerometer has been characterized in the self-testing mode and has demonstrated the functionality of the device.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992