Cart (Loading....) | Create Account
Close category search window
 

Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Weijie Yun ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Howe, R.T. ; Gray, P.R.

The authors have described a surface micromachined accelerometer with digital electrostatic feedback using Sigma - Delta modulation technique, fabricated in a modular CMOS/microstructure process. Detection circuits have been tested successfully. The unity gain buffer with low input capacitance can also be used for other capacitive detection applications. The accelerometer has been characterized in the self-testing mode and has demonstrated the functionality of the device.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.