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A micromachined condenser hydrophone

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1 Author(s)
Bernstein, J. ; Charles Stark Draper Lab., Cambridge, MA, USA

A micromachined, fluid-filled condenser hydrophone has been developed for underwater acoustic sensing. This device is under 1 mm in size, yet test results have demonstrated open circuit sensitivity of -206 dB ref. 1V/ mu Pa at 2 kHz, comparable to ferroelectric sensors orders of magnitude larger. The theory, fabrication and performance of the device are discussed.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992