Referenced Items are not available for this document.
The authors present a computationally efficient algorithm for the processing of data from multiple multi-featured masks to produce a planar map of the device topography in a format compatible with mechanical CAD systems.<
Published in:
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Date of Conference: 22-25 June 1992
- Page(s):
- 58 - 62
- Meeting Date :
- 22 Jun 1992-25 Jun 1992
- Print ISBN:
- 0-7803-0456-X
- INSPEC Accession Number:
- 4362991
- Conference Location :
- Hilton Head Island, SC, USA
- Digital Object Identifier :
- 10.1109/SOLSEN.1992.228276
- Product Type:
- Conference Publications
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