By Topic

Stability, sensitivity and selectivity of tungsten trioxide films for gas sensing applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
D. J. Smith ; Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA ; J. F. Vetelino ; R. S. Falconer ; E. L. Wittman

The stability, sensitivity and selectivity of RF sputtered gold doped tungsten trioxide (WO/sub 3/) films that have been proposed as the sensing element in Taguchi and surface acoustic wave (SAW) gas microsensors have been examined. The WO/sub 3/ film sensing properties such as electrical conductivity and carrier type, concentration and mobility were measured using both two and four point probe Hall effect techniques. It was found that in order for the WO/sub 3/ film to be stable, it was necessary to transform the as-deposited films from an amorphous to a polycrystalline structure through a heat treatment or 'activation' process. This activation process also dramatically improved the response time and sensitivity of the films to hydrogen sulfide (H/sub 2/S) gas. The authors show that properly prepared and treated gold doped WO/sub 3/ films are extremely stable, sensitive and selective to H/sub 2/S gas in the p.p.b. range.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992