Referenced Items are not available for this document.
The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV-in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.
Published in:
Electron Device Letters, IEEE
(Volume:27
,
Issue:
7
)
Date of Publication: July 2006
- Page(s):
- 598 - 601
- ISSN :
- 0741-3106
- INSPEC Accession Number:
- 8990879
- Digital Object Identifier :
- 10.1109/LED.2006.876324
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 26 June 2006
- Issue Date :
- July 2006
- Sponsored by :
- IEEE Electron Devices Society
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