By Topic

A MEMS Condenser Microphone for Consumer Applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Weigold, J.W. ; Analog Devices, Inc. Micromachined Products Division, Cambridge, MA, USA ; Brosnihan, T.J. ; Bergeron, J. ; Zhang, X.

This paper describes the design, fabrication, testing, and characterization of a MEMS microphone fabricated at Analog Devices. The device consists of a polysilicon diaphragm suspended over a single crystal silicon backplate fabricated on silicon on insulator (SOI) wafers. The MEMS microphone has been successfully fabricated and tested in an anechoic chamber. The microphone is fabricated using a process that is compatible with inexpensive high volume production using unit processes that are currently used to fabricate inertial sensors. Details of the design, fabrication, and electrical and acoustic characterization of the microphone will be presented.

Published in:

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

Date of Conference:

2006