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Browse Journals & Magazines > Microelectromechanical System ...> Volume:15 Issue:2 Help

Magnetic induction machines integrated into bulk-micromachined silicon

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6 Author(s)
Arnold, D.P. ; Georgia Inst. of Technol., Atlanta, GA, USA ; Das, S. ; Cros, F. ; Zana, Iulica
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This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 μN·m.

Published in:
Microelectromechanical Systems, Journal of  (Volume:15 ,  Issue: 2 )

Date of Publication: April 2006

Page(s):
406 - 414
ISSN :
1057-7157
INSPEC Accession Number:
8882366
Digital Object Identifier :
10.1109/JMEMS.2006.873951
Product Type:
Journals & Magazines
Date of Current Version :
10 April 2006
Issue Date :
April 2006
Sponsored by :
IEEE Electron Devices Society

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