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Marvelous MEMS

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7 Author(s)
J. Bryzek ; LV Sensors Inc., Emeryville, CA, USA ; S. Roundy ; B. Bircumshaw ; C. Chung
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Microelectromechanical systems (MEMS) are a foundation for a broad range of mechanical, chemical, optical, and biotech products (sensors, microstructures and actuators) fabricated as integrated circuits on (primarily) silicon wafers in a batch mode. Commercial MEMS products include pressure sensors, acceleration sensors, gyros, ink-jet nozzles, read-write head positioners in hard drives, and digital light processors (DLPs) in projectors and television sets. The first four decades of MEMS development created a US$8 billion market. During the next decade, the MEMS market is estimated to increase by US$32 billion. Based on the presented overview of emerging MEMS sensors and microstructures, such a magnitude of growth is definitely possible.

Published in:

IEEE Circuits and Devices Magazine  (Volume:22 ,  Issue: 2 )