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On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources

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2 Author(s)
D. Elata ; Fac. of Mech. Eng., Technion-Israel Inst. of Technol., Haifa, Israel ; H. Bamberger

This study considers the dynamic response of electrostatic actuators with multiple degrees of freedom that are driven by multiple voltage sources. The critical values of the applied voltages beyond which the dynamic response becomes unstable are investigated. A methodology for extracting a lower bound for this dynamic pull-in voltage is proposed. This lower bound is based on the stable and unstable static response of the system, and can be rapidly extracted because it does not require time integration of momentum equations. As example problems, the dynamic pull-in of two prevalent electrostatic actuators is analyzed.

Published in:

Journal of Microelectromechanical Systems  (Volume:15 ,  Issue: 1 )