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Buckling and free oscillations of composite microresonators

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2 Author(s)
He Li ; Dept. of Mech. Eng., Univ. of Maryland, College Park, MD, USA ; Balachandran, B.

Free oscillations of piezoelectric, microelectromechanical resonators are considered in this effort. These resonators are modeled as clamped-clamped composite structures, with stepwise varying properties across the length of the resonator. The different features of the model development are discussed, and buckling in these resonators is studied. A nonlinear analysis conducted to study oscillations about a buckled position is presented. The results of the analysis are found to compare well with the experimental observations.

Published in:

Microelectromechanical Systems, Journal of  (Volume:15 ,  Issue: 1 )