Referenced Items are not available for this document.
We report a novel one-axis MEMS optical scanner with a scan-angle magnifying mechanism. Small actuator-motion was amplified through the two-mass-two-spring mechanism, and a large mirror angle was obtained
Published in:
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Date of Conference: 1-4 Aug. 2005
- Page(s):
- 19 - 20
- Print ISBN:
- 0-7803-9278-7
- INSPEC Accession Number:
- 8634485
- Conference Location :
- Oulu
- Digital Object Identifier :
- 10.1109/OMEMS.2005.1540055
- Product Type:
- Conference Publications
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