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Two-axis MEMS scanner for display and imaging applications

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8 Author(s)
Urey, H. ; Electr. Eng. & Opt. Microsyst. Lab., Koc Univ., Istanbul ; Yalcinkaya, A.D. ; Montague, T. ; Brown, D.
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Two-axis gimbaled scanner used in an SVGA display product with 58deg optical scan angle, 1.5 mm mirror size, and 21 KHz resonant frequency is reported. Scanner is actuated electromagnetically using a single coil on the outer frame and by mechanical coupling of outer frame motion into the inner mirror frame

Published in:

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Date of Conference:

1-4 Aug. 2005