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A 220GHz wafer probe tip with reduced stray fields

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3 Author(s)
Campbell, R. ; Cascade Microtech, Inc., Beaverton, OR, USA ; Andrews, M. ; Bui, L.

A 220 GHz ground-signal-ground wafer probe is described with significantly reduced stray fields near the tip. The upper frequency limit in mm-wave wafer probes is constrained by the size of the probe tip area and stray fields. Measurements of the near-field tip area using a modulated scatterer instrument are presented. A new reduced dimension self-shielding tip design is shown with measured 140 GHz to 220 GHz S-parameter data. Measurements of 0 to 40 GHz crosstalk between pair of tips shows a 10 dB improvement over the present state-of-the-art.

Published in:

Microwave Symposium Digest, 2005 IEEE MTT-S International

Date of Conference:

12-17 June 2005