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Method for efficiently managing metrology queues

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3 Author(s)
Purdy, M. ; Adv. Micro Devices, Austin, TX ; Nicksic, C. ; Lensing, K.

A method of efficiently managing metrology WIP queues which ensures quality metrology data collection is presented in this paper. The principle behind the system is to identify and measure lots that provide the most recent information while allowing older lots to be removed from the queue. The factory system for making sampling decisions and how it interacts with the metrology queue management application is discussed. Examples of the logic flow for determining which lots can be removed from a metrology queue is used for demonstration purposes. Finally, a discussion on how the system has changed the way different factory departments define metrology sampling rules is discussed

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005