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Reaction chain of process queue time quality control

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3 Author(s)
Yih-Yi Lee ; Taiwan Semicond. Manuf. Co. Ltd., Tainan ; Chen, C.T. ; Wu, C.

Wafer fabrication is the most complex process in the semiconductor manufacturing industry which includes the reentrant events, process queue time limitation and batch run dispatching. A more advanced semiconductor technology generation and process queue time quality control is needed in the process. This study shows how to manage and dispatch in order to minimize the impact of process queue time quality because it becomes much more critical for the product yield as the generation advances. A management mechanism named reaction chains of process queue time quality control like the CIM system by Dr. Q is introduced in the paper. And it was proved to reduce a significant 98% of queue time lot counts compared before

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005