Scheduled System Maintenance on May 29th, 2015:
IEEE Xplore will be upgraded between 11:00 AM and 10:00 PM EDT. During this time there may be intermittent impact on performance. We apologize for any inconvenience.
By Topic

Measurement of conservation of energy by semiconductor manufacturing equipment and setting of targets for improvements

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Naughton, P. ; Sematech, Austin, TX

Resource consumption directly impacts the cost of semiconductor manufacturing and indirectly contributes to environmental pollution. Several resource conservation projects and surveys since 1996, have been performed at Sematech member companies and suppliers demonstrating significant reductions in tool and resource consumption are possible but are they enough? The ITRS roadmap continues to challenge new fabs to meet ever-decreasing energy goals. The World Semiconductor Council and SEMI have issued their white paper on energy suggesting normalized energy reductions for wafer fabs. In order to achieve measurable reductions both factory owners and tools suppliers need to baseline their energy consumption and establish specific targets for improvement

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005