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Microfabricated preconcentrator for quantitative analysis of low concentration volatile organic compounds

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5 Author(s)
H. K. L. Chan ; Eng. Res. Center for Wireless Integrated Microsystems, Michigan Univ., Ann Arbor, MI, USA ; S. W. Pang ; R. A. Veeneman ; E. T. Zellers
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A microfabricated preconcentrator that demonstrates vapor trapping ability for part-per-billion volatile organic compounds and integrated temperature sensing for heat transfer measurements is demonstrated. The preconcentrator design accommodates 3.3 mg of carbon adsorbents in a series of three 450 m deep Si cavities fabricated using deep reactive ion etching and sealed using wafer-level Au-Au thermocompression bonding at 400 °C. Backside Pt resistance temperature detectors (RTDs) are integrated to monitor heating rates and study forced convective heat transfer during the thermal desorption cycle where the preconcentrator is heated to 300 °C. The preconcentrator is being developed to enable high-speed chromatographic separations as a part of a low-power, portable microscale gas chromatography system.

Published in:

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  (Volume:2 )

Date of Conference:

5-9 June 2005