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This paper reports on the development of diamond probes integrated with a Si-based piezoresistive strain gauge for ultra-high-density ferroelectric data storage beyond 1 Tbit/inch2 with scanning nonlinear dielectric microscopy (SNDM). Only the tip of the probe was composed of diamond, and a cantilever integrated with the piezoresistive sensor was made of Si. The electrophoretic deposition process for diamond growth improved the production yield for sharp diamond tips. Topographic imaging using AFM was demonstrated at a constant force mode to verify the performance of the fabricated probe with the piezo strain gauge as a force sensor. SNDM experiments on a LiTaO3 substrate were performed. Clear contrast of SNDM image was obtained using the diamond probe.
Date of Conference: 5-9 June 2005