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MEMS probe cards with tip-to-pad electric feed-through and automatically isolated metal coating

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5 Author(s)
Nanxiang Guo ; Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai, China ; Xinxin Li ; Wang, Fei ; Yuelin Wang
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Presented is a newly developed MEMS probe-card with the technical requirements from Sino IC Technology Co. Ltd. for dies-under-test (DUT) of 8-inch wafers. By a double-sided metal overlapping scheme, electric feed-through is realized from the probe-tips at bottom to the automatic testing equipment (ATE) interface at topside. A recessed concave-step is formed to automatically isolate the adjacent probes when metal is sputtered on the cantilever-tips. A MEMS probe-card with nearly 100 silicon probes for simultaneously testing two dies is fabricated with bulk micromachining technology. Preliminary measurement shows below 1 Ω resistance for the feed-through electric connection from the tip to the wire-bonding pad.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005