Micromachined display device using sheet waveguide and multicantilevers driven by electrostatic force

A new structure for display devices is proposed and fabricated by the microelectromechanical systems process. The device is based on physical contact and evanescent coupling between a sheet waveguide and electrostatically driven multicantilevers. When incident light is propagated into the waveguide and the cantilevers contact the waveguide by applying a dc voltage, the switched light is emitted from the side edges of the contacted multicantilevers, resulting in a display device. The device contributes to the expansion of the switching area, the removal of unnecessary scattered light, and high contrast due to the simple fabrication and structure with corner spacers for the optical separation between the cantilevers and the waveguide. Based on the experimental results with the device, a contrast of 0.9 is obtained at 170 V, and a stable drive is realized up to 1 kHz. Therefore, the device can be expected to be used for display devices by the fabrication of an array structure.