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High-voltage silicon thin film transistor on quartz

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2 Author(s)
T. Unagami ; Nippon Telegraph and Telephone Public Corporation, Ibaraki-Ken, Japan ; B. Tsujiyama

A high voltage enhancement-type thin film transistor (TFT) has been fabricated on quartz in layers of laser-recrystallized polysilicon. The fabrication details and TFT characteristics are described.

Published in:

IEEE Electron Device Letters  (Volume:3 ,  Issue: 6 )