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A low power ASIC for the control of a mobile micro-actuator array

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1 Author(s)
D. Ruffieux ; Centre Suisse d'Electronique et de Microtechnique SA, Neuchâtel, Switzerland

The design and measurements of a low-power ASIC controlling the actuation of a piezoelectric microfabricated actuator array capable of locomotion is reported. The circuit, which is powered by a solar cell, has an integrated photodiode and the appropriate front-end for the reception of an infrared pulse stream that encodes the direction and pace of motion of the actuators. It also features a variable frequency oscillator and a sequencer controlling low power high voltage drivers capable of handling voltages as high as -10V and +20V, though the circuit was implemented in a conventional sub-micron 5V technology. The circuit operates at 2 volts, with a power consumption of a few microwatts under the strong background illumination necessary to power the actuators.

Published in:

Solid-State Circuits Conference, 1999. ESSCIRC '99. Proceedings of the 25th European

Date of Conference:

21-23 Sept. 1999