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Semiconductor manufacturing is considered as one of the most complex manufacturing process. Due to its large-scale, uncertainty, reentrance and mixed processing, it needs true dynamic scheduling method urgently. On the analysis of the self-organizing activities of ant colony system, the pheromone based dynamic scheduling rule is presented. The rule is simulated and the result analysis is given by comparing with other heuristic scheduling methods, which show that this method can optimize multi objectives of the semiconductor fabrication line and has a good perspective.