The micromachined flashFET: a low-power, three-terminal device for high speed detection of vapors at atmospheric pressure

This work demonstrates a three-electrode configuration for initiating microdischarges, and its application to the spectral detection of organic vapors. A strategically located high impedance gate electrode permits the microdevice to be operated with pulses less than 100 V, applied between the source and drain. The device thus consumes only 2.5 /spl mu/J/pulse at 140 Torr and 22.5 /spl mu/J/pulse at atmosphere. The microdischarge breaks down the complex organic vapors into small fragments that have characteristic emission in the UV-visible region. The operation of the flashFET as a gas sensor is evaluated by detecting acetone vapors in air ambient. The present manifestation of the device has a 1 mm /spl times/ 1 mm footprint and is made with thick electroplated copper patterned on a glass substrate.